（SMA type)◯As the axis of the joint shafts cannot be strictly defined ◯ As the axis of the joint shafts cannot be strictly defined motion of the robot can not be expressed well by using the joint motion of the robot can not be expressed well by using angles. Our challenge is a kinematics that does not use joint angles. the joint angles. Our challenge is a kinematics that does not use joint angles. Nano-nozzleHollowetchingMagneto-strictive film actuator5μmEnvironment-thermally driven hopping actuatorfor HAYABUSA-2 asteroid explorer rover MINERVA-II-20.2 mm1mm1 mm58SMA触覚ディスプレイA soft robot joint was made using a rubber bearing holder. Elastic tendon drive method enables simple joint mechanism without motors, reductions, and encoders. Kinematics without using joint angles is useful when controlling this type of soft robot, because the joint angles are not strictly determined due to the swing motion of the joint axis. Dual AFM nano-probe for bio-molecular Imaging/operation(Narrow gapped hollow probes,magneto-strictive switchable cantilevers)200 µm1 µmCylindrical lithography (home made system)Tactile display deviceSMA micro-catheter（Tubular bending actuator fabricated by cylindrical lithography and electrolytic etching of an SMA tube)Micro-robot finger（Shape memory alloy thick film,integrated with strain sensor and micro-heater circuits)SMA thick film flash-evaporation（home made system）Surface property changeable device using soft material PDMS（active wetting control, tactile feeling changeable skin)ContentContent：◯ This project aims for a soft robot with elastic joints by ◯This project aims for a soft robot with elastic joints by avoiding use of rigid shaft and bearings.avoiding use of rigid shaft and bearings.◯ Elastic tendon driving method allows simple mechanism ◯Elastic tendon driving method allows simple mechanism of of joints. ( motors, reductions, and encoders are not joints. ( motors, reductions, and encoders are not installed in the joints)installed in the joints)robot arm by using low cost materials. ContentContents：WestudyonMEMS,micro-electro-mechanical-systems,devices We study on MEMS, micro-electro-mechanical-systems, devices such as micro-sensors and actuators. In particular, suchasmicro-sensorsandactuators.Inparticular,westudythewe study the combination of MEMS/NEMS devices with combinationofMEMS/NEMSdeviceswithsmartmaterialthinfilmssmart material thin films such as shape memory alloys (SMA), suchasshapememoryalloys(SMA),magneto-strictivealloys,andmagneto-strictive alloys, and soft materials (PDMS). Based softmaterials(PDMS).Basedonthetechnologies,tactiledisplayon the technologies, tactile display devices to present feelings, micro-robotic devices for bio-medical manipulations, devicestopresentfeelings,micro-roboticdevicesforbio-medicalmulti-functional AFM nano devices for bio-molecular manipulations,multi-functionalAFMnanodevicesforbio-molecularoperations, remote control mechanism for asteroid probe operations,remotecontrolmechanismforasteroidprobehavebeenhave been developed in our laboratory. For the micro/nano developedinourlaboratory.Forthemicro/nanodevices,wehavedevices, we have also developed fabrication process technologies in micro/nano scale, for example, thin and thick alsodevelopedfabricationprocesstechnologiesinmicro/nanoscale,film deposition of smart materials, micro/nano lithography, forexample,thinandthickfilmdepositionofsmartmaterials,and micro-etching techniques. micro/nanolithography,andmicro-etchingtechniques.Appealingpoint：Planarand3Dstructuredmicro/nanodevicescanSpecial objectivesberealizedforwideapplicationfieldsbyusingouroriginalprocess Planar and 3D structured micro/nano devices can be technologiesandMEMS/NEMSfabricationtechniques,realized for wide application fields by using our original process technologies and MEMS/NEMS fabrication Yamagata University Graduate School of Science and Engineering techniques, Research Interest：MEMS,NEMS,Appealing point：Special objectives◯One of the goals is a disposable and on site customizable robot arm by using low cost materials. ◯ One of the goals is a disposable and on site customizable Yamagata UniversityGraduate School of Science and Engineering Research Interest ：Robot mechanics and mechanismMicrosensor，Microactuator，Micro/nanofabricationYamagata University Graduate School of Science and Engineering E-mail ：mitobe@yz.yamagata-u.ac.jpResearch InterestTel ：+81-238-26-3230Robot mechanics and mechanismFax：+81-238-26-3205E-mail ・ mitobe@yz.yamagata-u.ac.jp Tel ・ +81-238-26-3230HP ：https://mtb9.yz.yamagata-u.ac.jp/japanese/index.htmFax ・ +81-238-26-3205HP・https://mtb9.yz.yamagata-u.ac.jp/japanese/index.htmYamagata University Graduate School of Science and Engineering MEMS, NEMS,Research InterestMicro sensor，Micro actuator， E-mail：mineta-t@yz.yamagata-u.ac.jpMicro/nano fabricationTel ：0238-26-3192E-mail ・ mineta-t@yz.yamagata-u.ac.jpTel ・ +81-238-26-3192Fax：0238-26-3192Fax ・ +81-238-26-3192HP ：http://mineta_lab.yz.yamagata-u.ac.jp/HP・http://mineta_lab.yz.yamagata-u.ac.jp/Soft robot control by avoiding use of joint variables MEMS/Nano device and micro/nano fabrication processesMEMS/Nano device and micro/nano fabrication processesProfessor, Kazuhisa (Kaz) MitobeProfessor Kazuhisa (Kaz) MitobeProfessor Takashi MinetaProfessorTakashi MinetaSoft robot control by avoiding use of joint variables
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